Factory Service

• Clean Room
• Frozen Water
• Heating Water
• CDA
• PCW
• RO Water
• DI Water
• Acid and alkali waste water treatment
• Organic Waste water Treatment
• Arsenic-containing Waste water Treatment
• Hydrogen
• Nitrogen

Corollary Equipment

• Helium leak detector
• Quartz pieces baking
• Graphite tray baking
• Cleaning of arsenic and phosphorus filters