Test Service

Crystal structure

Testing device

High resolution XRD

Model

PANalytical X'pert3 MRD

Accuracy scope

Swing curve, ω / 2θ scan, triaxial crystal resolution 12 ”

Electric quality

Testing device

Hall test system

Model

Nanometrics HL5500PC

Accuracy scope

Support low temperature 77K test

Optical quality

Testing device

Photoluminescence Spectroscopy

Model

Nanometrics RPMBlue

Accuracy scope

532nm laser, measurable wavelength 400-2040nm

Doping concentration

Testing device

Electrochemical ECV

Model

Nanometrics ECVpro

Accuracy scope

Carrier concentration 1E13 ~ 1E20cm-3, corrosion depth range 50nm ~ 50μm

Surface resistance

Testing device

Non-contact thin film resistance tester

Model

Lehighton LEI1510EC

Accuracy scope

Resistivity 0.01-200Ω-cm

High resistance

Testing device

Non-contact thin film high resistance tester

Model

SemiMap Corema-ER

Accuracy scope

Resistivity 1E5 ~ 1E12 ohm-cm

Surface defects

Testing device

Surface defect analysis

Model

KLA Candela 8420

Accuracy scope

Smallest particle 80nm diameter

Optical information

Testing device

spectrometer

Model

PerkinElmer Lambda950

Accuracy scope

Spectral wavelength 200-3300nm

Material thickness

Testing device

Level gauge

Model

KLA P-7

Accuracy scope

Maximum resolution 0.5Å

Surface topography

Testing device

Polarizing microscope

Model

Leica DM3 XL

Accuracy scope

1000 times optical magnification

Surface topography

Testing device

scanning electron microscope

Model

FEI Apreo

Accuracy scope

Gold sprayable, with 1nm of minimum accuracy